| year | 2014 |
| author(s) | A.L. Grab, M. Hagmann, R. Dahint, C. Cremer |
| title | Localization microscopy (SPDM) facilitates high precision control of lithographically produced nanostructures. |
| KIP-Nummer | HD-KIP 14-75 |
| KIP-Gruppe(n) | F2 |
| document type | Paper |
| Keywords (shown) | Localization microscopy, Spectral precision distance microscopy(SPDM, Calibration |
| source | Micron 68 (2015) 1-7 |
| doi | http://dx.doi.org/10.1016/j.micron.2014.08.003 |
| Abstract (en) | Nanoscale resolution in material sciences is usually restricted to scanning electron beam microscopes.Here we present a procedure that allows single molecule resolution of the sample surface with visi-ble light. Highlighting the performance we used electron beam lithography to generate highly regularnanostructures consisting of interconnected cubes. The samples were labeled with Alexa 647 dyes. Thespatial organization of the dyes on nanostructured surfaces was localized with single molecule resolutionusing localization microscopy. This succeeded also in an absolute spatial calibration of the localizationmethod applied (spectral precision distance microscopy/SPDM). The findings will contribute to the fieldof product control for industrial applications and long-term fluorescence imaging. |
