Micro-analysis
New production techniques in the semiconductor industry and in the bio- and nano-technology require constantly improved analysis methods in order to guarantee the production quality. In particular, position sensitive methods are necessary to investigate the chemical composition of surfaces. Cryogenic detectors allow the investigation of such surfaces with particularly high spectral resolution in the x-ray range. First commercial devices for x-ray fluorescence analysis are available on the market. Fig. 1 shows schematically a x-ray fluorescence unit with cryogenic detector and Fig. 2 shows a spectrum for a TiN surface obtained with such a device at NIST in Boulder, USA.
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