| Jahr | 2008 |
| Autor(en) | Torsten Hellmann |
| Titel | FTIRS an PECVD-Schichten |
| KIP-Nummer | HD-KIP 08-52 |
| KIP-Gruppe(n) | F6 |
| Dokumentart | Diplomarbeit |
| bibtex | @mastersthesis{HellmannDip,
author = {Hellmann, Torsten},
title = {{FTIRS an PECVD-Schichten}},
school = {Ruprecht-Karls-Universit{\"{a}}t},
year = {2008},
type = {Diplomarbeit},
address = {Heidelberg}
} |
