KIP publications

 
year 2004
author(s) A. Priebe, N. Walter, and A. Pucci
title An IR spectroscopic study of silicon oxynitride films.
KIP-Nummer HD-KIP 04-72
KIP-Gruppe(n) F6
document type Paper
source Conference Digest of the 29th International Conference on Infrared and Millimeter Waves and of the 12th International Conference on Terahertz Electronics, Karlsruhe,Germany, 2004 (edited by M. Thumm and W. Wiesbeck), IEEE Catalog No. 04X857, ISBN 0-78038490-3, p.93
doi 10.1109/ICIMW.2004.1421969
bibtex
@inproceedings{Priebe04b,
  author   = {Priebe, A. and Walter, N. and Pucci, A.},
  title    = {An IR spectroscopic study of silicon oxynitride  films.},
  booktitle = {Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the },
  year     = {2004},
  editor   = {Thumm, M. and Wiesbeck, W.},
  volume   = {},
  pages    = {93}
}
URL http://dx.doi.org/10.1109/ICIMW.2004.1421969
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