KIP-Veröffentlichungen

Jahr 2004
Autor(en) A. Priebe, N. Walter, and A. Pucci
Titel An IR spectroscopic study of silicon oxynitride films.
KIP-Nummer HD-KIP 04-72
KIP-Gruppe(n) F6
Dokumentart Paper
Quelle Conference Digest of the 29th International Conference on Infrared and Millimeter Waves and of the 12th International Conference on Terahertz Electronics, Karlsruhe,Germany, 2004 (edited by M. Thumm and W. Wiesbeck), IEEE Catalog No. 04X857, ISBN 0-78038490-3, p.93
doi 10.1109/ICIMW.2004.1421969
bibtex
@inproceedings{Priebe04b,
  author   = {Priebe, A. and Walter, N. and Pucci, A.},
  title    = {An IR spectroscopic study of silicon oxynitride  films.},
  booktitle = {Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the },
  year     = {2004},
  editor   = {Thumm, M. and Wiesbeck, W.},
  volume   = {},
  pages    = {93}
}
URL http://dx.doi.org/10.1109/ICIMW.2004.1421969
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