Beetle - a readout chip for LHCb

 

Content

Electron Microscope

April 2004

Surface analysis of the last metal layer with an electron microscope. The Polyimid layer was removed with a UV-laser.

Frontend

Input pads

and a picture taken from the same region with a standard microscope

Pipeline

and a picture taken from the same region with a standard microscope

Beetle Logo
   
Next - Previous - Home

Letzte Änderung: 5 Mar 2007