KIP-Veröffentlichungen

 
Jahr 2020
Autor(en) Karl-Philipp Strunk, Maximilian Bojanowski, Christian Huck, Markus Bender, Lisa Veith, Michael Tzschoppe, Jan Freudenberg, Irene Wacker, Rasmus R. Schroeder, Annemarie Pucci, Christian Melzer and Uwe H.F. Bunz
Titel Electron-Beam Irradiation of Cinnamate Films Affords Nanoscale Patterned Substrates for Use in Devices and as Scaffolds in Tissue Engineering
KIP-Nummer HD-KIP 20-49
KIP-Gruppe(n) F6
Dokumentart Paper
Quelle ACS Applied Nano Materials 2020, 3, 8, 7365–7370
doi 10.1021/acsanm.0c00458
Abstract (en)

Fabrication of electronic, photonic and meta-material-based devices, or tissue engineering requires the controlled deposition and patterning of materials. Electron-beam lithography (EBL) offers unprecedented miniaturization of those devices due to its high resolution. We present a concept to induce a classic photochemical reaction in condensed matter via electron-beam lithography. We investigate the response of a tetrameric cinnamate monomer in thin films towards photo- and electron-radiation. In the solid state, photoexcitation and electron bombardment similarly induce [2+2]-cycloadditions forming insoluble truxilic acid esters, as shown via IR spectroscopy measurements. Subsequently, we employed the investigated material as an electron beam resist, showing resistance against wet-chemical etchants. Structures with resolution down to 60 nm were obtained, not achievable with conventional photolithography, proving that the [2+2] cycloaddition of cinnamic acid containing compounds is suitable for applications in the field of electron beam lithography.

bibtex
@article{doi101021acsanm0c00458,
  author   = {Strunk, Karl-Philipp and Bojanowski, N. Maximilian and Huck, Christian and Bender, Markus and Veith, Lisa and Tzschoppe, Michael and Freudenberg, Jan and Wacker, Irene and Schroeder, Rasmus R. and Pucci, Annemarie and Melzer, Christian and Bunz, Uwe H.F.},
  title    = {Electron-Beam Irradiation of Cinnamate Films Affords Nanoscale Patterned Substrates for Use in Devices and as Scaffolds in Tissue Engineering},
  journal  = {ACS Applied Nano Materials},
  year     = {2020},
  volume   = {3},
  number   = {8},
  pages    = {7365-7370},
  doi      = {10.1021/acsanm.0c00458}
}
URL doi:10.1021/acsanm.0c00458
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